Produzione Scientifica
Found 2 results
Filters: Keyword is Ions and Author is Signore, M.A. [Clear All Filters]
Effect of the substrate temperature on zirconium oxynitride thin films deposited by water vapour-nitrogen radiofrequency magnetron sputtering,
, Thin Solid Films, Volume 518, Number 8, p.1943-1946, (2010)
Investigation of the physical properties of ion assisted ZrN thin films deposited by RF magnetron sputtering,
, Journal of Physics D: Applied Physics, Volume 43, Number 22, (2010)