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Metal-functionalized and vertically-aligned multiwalled carbon nanotube layers for low temperature gas sensing applications

TitleMetal-functionalized and vertically-aligned multiwalled carbon nanotube layers for low temperature gas sensing applications
Publication TypeArticolo su Rivista peer-reviewed
Year of Publication2010
AuthorsPenza, Michele, Rossi R., Alvisi Marco, Signore M.A., Cassano Gennaro, Pentassuglia Rocco, Suriano Domenico, Pfister Valerio, and Serra Emanuele
JournalLecture Notes in Electrical Engineering
Volume54 LNEE
ISBN Number9789048136056
KeywordsAligned carbon nanotubes, Aligned CNTs, Alumina substrates, Carbon films, Carbon nanotubes, Charge transfer, Chemical detection, Electric conductivity, electrical conductivity, Fast response, Fe catalyst, Functionalized, Gas detectors, Gas sensing applications, Gas sensing properties, Gas sensitivity, High sensitivity, Inert gases, Ion exchange, Landfill gas, Low temperatures, Metals, Microsystems, Multiwalled carbon nanotubes (MWCN), Noble metals, Nominal thickness, Order of magnitude, P-type, Plasma deposition, Plasma enhanced chemical vapor deposition, Platinum, Precious metals, Radio frequency plasma, Range detection, Room temperature, Sensors, silver, Spillover effects

Vertically-aligned carbon nanotubes (CNTs) films have been grown by radiofrequency plasma-enhanced chemical vapor deposition system onto alumina substrates, coated with 2.5 nm thick Fe catalyst, for NO2, H 2 and C2H5OH gas sensing applications, at sensor temperatures from room-temperature to 150°C. The CNTs appear in the form of forest-like structure. Nanoclusters of noble metals with nominal thickness of 5 nm of Pt, Ru and Ag have been sputtered on the top-surface of the vertically-aligned CNTs layers to enhance the gas sensitivity. It was demonstrated that the gas sensitivity of the metal modified CNTs-sensors significantly improved by a factor up to an order of magnitude through a spillover effect, and a broader selectivity was provided. The gas sensing properties of the CNTs-sensors, including the metal-modified CNTs, are characterized by a change of the electrical conductivity in a model of the charge transfer with a semiconducting p-type character. The metal-functionalized CNTs-sensors exhibit high sensitivity, fast response, reversibility, good repeatability, sub-ppm range detection limit. A practical application of the CNTs-sensors for monitoring landfill gas is presented. © 2010 Springer Science+Business Media B.V.


cited By 0; Conference of 14th Italian Conference on Sensors and Microsystems, AISEM 2009 ; Conference Date: 24 February 2009 Through 26 February 2009; Conference Code:80319

Citation KeyPenza2010185