Experimental results on silicon annealing by a long-pulse, high-power XeCl laser system, Murra, D., Bollanti S., Bonfigli F., Della Sala Dario, Di Lazzaro P., and Letardi T. , Proceedings of SPIE - The International Society for Optical Engineering, Volume 4070, Potenza-Lecce, Italy, p.345-350, (2000)