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Convertino, A.
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1998
Synthesis of silicon carbide thin films by ion beam sputtering
,
Valentini, A.
,
Convertino A.
,
Alvisi Marco
,
Cingolani R.
,
Ligonzo T.
,
Lamendola R.
, and
Tapfer Leander
, Thin Solid Films, Volume 335, Number 1-2, p.80-84, (1998)
