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High-reflectivity HfO2/SiO2 ultraviolet mirrors

TitleHigh-reflectivity HfO2/SiO2 ultraviolet mirrors
Publication TypeArticolo su Rivista peer-reviewed
Year of Publication2002
AuthorsTorchio, P., Gatto A., Alvisi Marco, Albrand G., Kaiser N., and Amra C.
JournalApplied Optics
Volume41
Pagination3256-3261
ISSN00036935
Abstract

High-reflectivity dense multilayer coatings were produced for the ultraviolet spectral region. Thin-film single layers and UV mirrors were deposited by ion plating and plasma ion-assisted deposition highenergetic technologies. Optical characterizations of HfO2 and SiO2 single layers are made. The optical constants obtained for these two materials are presented. HfO2 and SiO2 mirrors with a reflectance of ∼99% near 250 nm are reported. © 2002 Optical Society of America.

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URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0036603444&partnerID=40&md5=94c424c5dfaf21f3f6fe3b8f9e1005c2
Citation KeyTorchio20023256