Produzione scientifica
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Filtri: Parola Chiave is Polysilicon and Autore is Loreti, S. [Clear All Filters]
In situ excimer laser annealing of low-temperature low-pressure chemical vapour deposition grown polycrystalline silicon: Influence of metal diffusion on the film morphology and on the growth rate,
, Thin Solid Films, Volume 458, Number 1-2, p.1-8, (2004)
Metal-induced crystallization of polycrystalline silicon by in-situ excimer laser annealing during low-pressure CVD growth,
, Materials Science Forum, Volume 453-454, Herceg Novi, p.43-46, (2004)
Laser-assisted chemical vapor deposition of thick poly-Si layers for solar cells,
, Thin Solid Films, Volume 403-404, Strasbourg, p.302-306, (2002)