Divisione Tecnologie e processi dei materiali per la sostenibilità

Found 5 results

Filtri: Autore is Carla Minarini and Parola Chiave is Chemical vapor deposition [Clear All Filters]

2004

In situ excimer laser annealing of low-temperature low-pressure chemical vapour deposition grown polycrystalline silicon: Influence of metal diffusion on the film morphology and on the growth rate, Loreti, S., Santoni A., Lancok J., Menicucci I., Minarini Carla, and Della Sala Dario , Thin Solid Films, Volume 458, Number 1-2, p.1-8, (2004)

Metal-induced crystallization of polycrystalline silicon by in-situ excimer laser annealing during low-pressure CVD growth, Loreti, S., Santoni A., Fryček R., Menicucci I., Minarini Carla, and Della Sala Dario , Materials Science Forum, Volume 453-454, Herceg Novi, p.43-46, (2004)

2003

Low-temperature laser-CVD thin film growth of SiC from Si2H 6 and C2H2, Santoni, A., Lancok J., Loreti S., Menicucci I., Minarini Carla, Fabbri F., and Della Sala Dario , Journal of Crystal Growth, Volume 258, Number 3-4, p.272-276, (2003)

2002

In situ laser recrystallization of Si layers during low-pressure chemical vapor deposition: Recrystallization dynamics and influence of the seed layer, Della Sala, Dario, Santoni A., Fornarini L., Lancok J., Loreti S., Menicucci I., and Minarini Carla , Journal of Materials Research, Volume 17, Number 11, p.2966-2973, (2002)

Laser-assisted chemical vapor deposition of thick poly-Si layers for solar cells, Della Sala, Dario, Loreti S., Fornarini L., Menicucci I., Santoni A., P. Veneri Delli, Minarini Carla, Privato C., and Lancock J. , Thin Solid Films, Volume 403-404, Strasbourg, p.302-306, (2002)