We investigate the structural properties and, in particular, the residual stress of carbon implanted TiN coatings by means of glancing incidence x-ray diffraction and secondary ion mass spectrometry. The coatings were grown by ion beam physical vapor deposition on steel substrates and subsequently implanted at 100 KeV with carbon doses of 1×1017 ions/cm2, 3×1017 ions/cm2 7×1017 ions/cm2, respectively. The carbon depth profiles obtained by secondary ion mass spectrometry enable us to choose the more appropriate x-ray beam incidence angles in order to detect the structural variations in proximity of the implanted region. The x-ray results indicate notable variations both in the crystallinity and in the residual stress and such modifications depend on the carbon dose and penetration depth.

cited By 0; Conference of 7th European Powder Diffraction Conference ; Conference Date: 20 May 2000 Through 23 May 2000; Conference Code:58844