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Divisione Tecnologie e processi dei materiali per la sostenibilità

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Produzione scientifica

Found 2 results
Filtri: Autore is Signore, M.A. and Parola Chiave is Secondary ion mass spectrometry  [Clear All Filters]
2010
Effect of the substrate temperature on zirconium oxynitride thin films deposited by water vapour-nitrogen radiofrequency magnetron sputtering, Signore, M.A., Rizzo A., Tapfer Leander, Piscopiello E., Capodieci Laura, and Cappello A. , Thin Solid Films, Volume 518, Number 8, p.1943-1946, (2010)
2007
Characterization of zirconium oxynitride films obtained by radio frequency magnetron reactive sputtering, Signore, M.A., Rizzo A., Mirenghi L., Tagliente M.A., and Cappello A. , Thin Solid Films, Volume 515, Number 17, p.6798-6804, (2007)